真空紫外双等离子体光源的研究

INVESTIGATION ON VUV DUOPLASMATRON SOURCE

本文描述我们研制的真空紫外双等离子体光源的设计、结构及工作原理,讨论真空紫外性能测试,给出光源的真空紫外辐射特性测试结果。

This paper describes the design, the structure and the working principle of the duoplasmatron source developed in our lab, discusses the performence evaluation in the VUV spectral range, and finally gives the measurement results of VUV spectral radiation performence of the source.