摘要
用二维光学多道分析仪研究了低气压表面波型微波感耦氬等离子体的光谱辐射特性?鼳bel反演后,得到了在各种气压和微波功率下等离子体辐射光强和激发温度的空间分布及其变化规律。讨论了此等离子体的激发机理。
Emission spectra of a low pressure argon microwave-induced plasma sustained by a surfatron were studied using OMA-3. After Abel inversion, the spatial distributions of emission spectral intensities and excitation temperatures of the plasma were given at different argon pressures and microwave powers. The excitation mechanism of the plasma was discussed.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
1992年第3期43-48,共6页
Spectroscopy and Spectral Analysis
基金
国家自然科学基金~~
关键词
辐射光谱
激发机理
氩-MIP
Low pressure Ar-MIP, Emission spectra, Excitation temperature, Spatial distribution, Excitation mechanism
