摘要
本文综述了用溶胶—凝胶法制备择优取向铁电薄膜的工艺方法、特点和机理的最新研究进展;详细分析溶胶—凝胶法制备择优取向铁电薄膜的影响因素,探讨了晶粒择优取向生长的机理。
Preparation and characteristics of preferred oriented ferroelectric thin films derived from sol-gel method are described. The processing technology and mechanism of preferred oriented PZT and PT ferroelectric thin films by sol-gel method were discussed.
出处
《中国陶瓷》
CAS
CSCD
2003年第1期8-11,22,共5页
China Ceramics