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溶胶—凝胶法制备晶粒择优取向铁电薄膜的研究 被引量:1

R&D OF PREFERRED ORIENTED FERROELECTRIC THIN FILM PREPARED BY SOL - GEL METHOD
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摘要 本文综述了用溶胶—凝胶法制备择优取向铁电薄膜的工艺方法、特点和机理的最新研究进展;详细分析溶胶—凝胶法制备择优取向铁电薄膜的影响因素,探讨了晶粒择优取向生长的机理。 Preparation and characteristics of preferred oriented ferroelectric thin films derived from sol-gel method are described. The processing technology and mechanism of preferred oriented PZT and PT ferroelectric thin films by sol-gel method were discussed.
出处 《中国陶瓷》 CAS CSCD 2003年第1期8-11,22,共5页 China Ceramics
关键词 溶胶-凝胶法 制备 晶粒 择优取向 铁电薄膜 研究 机理 ferroelectric thin film Sol - Gel method preferred oriented mechanism
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参考文献21

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共引文献15

同被引文献27

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