X射线波段多层膜光学元件及其应用

Multilayer Elements of Soft X-ray

用于 X 射线、特别是软 X 射线其波长范围约为(1～30)nm 波段的多层膜光学元件近十年来引起了人们的广泛重视,取得了许多重要进展。本文对这种多层膜光学元件的特点、制备和检测方法、应用领域、以及国内有关工作的近况做简要介绍。

The optical multilayer elements,applied in X-ray technique,esp- ecially soft X-ray,((1—30)nm) which have been collected massive int- eresting,have got many important developments in recent decade. In this paper,some things about X-ray multilayer elements,such as the characteristics,manufacturing and measuring methods,their applied field and the investgation status of domestic progress,are given briefly,based on the author's experience.