用ZYGO数字干涉仪检测非球面的新方法

A New Method of Measuring Aspheric Surfaces Using ZYGO Interference System

提出了在 ZYGO 数字干涉仪上用计算机全息术检测非球面的新方法。这一方法利用了菲索干涉仪光路,并合理设计光学系统使非球面波完全自准返回,消除了非球面检验中的波面的变形传播引起的测量误差。同时,充分保留了 ZYGO 数字干涉仪本身具有的位相法干涉图处理机能。以抛物面为例加以对比、验证,证明了将数字干涉仪与计算机全息术巧妙地结合用于检测非球面是行之有效的方法。

This paper represents a method of measuring aspheric surfaces with CGH,using ZYGO interference system.Testing a parabolic surface is used as an example in the paper.It proves that it is effe- ctive that ZYGO interferometer is used together with computer hol- ography for measuring of aspheric surfaces.