使用对称闪耀光栅的光学四倍频微位移传感器

Fourfold Frequency Optic Sensor with a Symmetrical Blazed Grating for Micro-displacement

介绍了使用对称闪耀光栅的光学四倍频微位移传感器的原理、结构和其实验研究的结果。

In this paper,the theory and structure of fourfold frequency optic sensor with a symmetrical blazed grating for micro-displace- ment are introduced.The exprimental results are given.