透明导电薄膜ZnO:Al(ZAO)的性能及其在有机发光二极管中的应用

PROPERTIES OF TRANSPARENT CONDUCTING ZnO : Al (ZAO) OXIDE THIN FILM AND ITS APPLICATION FOR ORGANIC LIGHT-EMITTING DIODES (OLEDs)

研究了ZAO透明导电薄膜的微观组织结构、化学成分及其电学光学特性.结果表明,多晶ZAO薄膜呈柱状晶并具有(002)面择优取向, c轴晶格常数大于0.52000 nm;ZAO薄膜不同微区之问的成分不均匀导致了电学性能的不均匀; ZAO薄膜的电阻率和在可见光区的平均透射率分别为1.39×10-4 Ω·cm和80.8％.其透射率和吸收率曲线均具有明显的波动性,该波动性影响以ZAO为阳极的有机发光二极管的发射光谱,在5.38 A/m2电流密度下二极管的发光效率大于2 cd/A.

The micro-structural, electrical and optical properties as well as half-quantitative micro-compositional analysis of aluminum-doped zinc oxide (ZAO) films were investigated. It was revealed that the polycrystalline film is (002) preferred texture and columnar structure, and the caxis is larger than 0.52000 mn. Nonuniformity of component through micro-zones was also observed. The resistivity and average transmittance in the visible region were measured to be 1.39x10(-4) Omega.cm and 80.8%, respectively. The optical oscillatory character of ZAO films was verified to impact the electroluminescent (EL) spectra of EL devices. ZAO films were used as the transparent anode to fabricate the organic light emitting devices with a luminance efficiency more than 2 cd/A at a current density 5.38 A/m(2).