大非球面主镜细磨时面形的检验

Testing fine-ground surface of large aspherical mirror

本文采用非电量测量技术来实现大非球面主、副镜在细磨阶段的检验,从而解决了在细磨阶段的非球面度的问题。

Using the technique of non-electric quantity measurement, the fine-ground surface of large aspherical primary and secondary mirrors can be tasted. Thus, the asphericity can be revised in the finegrinding process.