摘要
本文着重介绍计量光栅使用原理、计量光栅的机械刻划工艺、照相复制技术和光栅精度测量等。
The operating principle of metrical grating, the mechanical-graduating technology and photographic-copying technique of metrical grating, as well as the accuracy measurement of grating are mainly discussed.
出处
《光学技术》
CAS
CSCD
1992年第5期26-27,共2页
Optical Technique