从薄膜波导传播衰减的角度研究光学薄膜的损耗:(Ⅰ)理论分析

Studies on optical thin film loss from the analysis of the attenuations of guided waves: (I) theoretical analysis

本文从理论上分析了光学薄膜中的三种基本缺陷:折射率消光系数、表面粗糙度以及折射率不均匀性对薄膜内导波传播衰减的影响.基于这些缺陷对光学薄膜内不同导模传播衰减作用的不同,提出了一种区分薄膜中的吸收与散射损耗的方法.

The influences of extinction coefficient of refractive index, roughness of the interfaces and index heteogeneities of an optical thin film waveguide on the attenuations of guided modes are analysed theoretically in this paper. Based on the characteristics of the attenuation coefficients of diffioient modes due to these imperfaotion factors, a new method is proposed to seperate the absorption loss and scattering loss of the thin film.