摘要
用离子束溅射沉积的方法制备的TiO_2、ZrO_2薄膜的光吸收损耗明显降低,对其折射率、光吸收和抗激光损伤阈值等特性进行了分析.
TiO2 and ZrO2 thin films were deposited by ion-beam sputtering. Their refractive indices, optical absorption and laser-induced damage thresholds are investigated. The optical absorption of the coatings are decreased obviously.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1992年第5期473-475,共3页
Acta Optica Sinica
关键词
离子束
溅射沉积
薄膜
光学特性
ion beam sputtering deposition, thin film, optical properties.
