摘要
本文从实验的角度介绍从薄膜导波传播衰减研究光学薄膜损耗的方法,并以一些低损耗的光学薄膜样品的测量结果说明这种方法对损耗研究的灵敏程度及其优越性.
The studying method of optical thin film loss from the analysis of attenuations of guided waves in the films is presented experimentally in this paper. The advantages and high sensitivity of this method for dealing the loss of thin films have been demonstrated by the experimental results of several low loss thin film samples.
出处
《光学学报》
EI
CAS
CSCD
北大核心
1992年第6期553-557,共5页
Acta Optica Sinica
关键词
光损耗
光学薄膜
光波导
光散射
optical loss, thin film, waveguide, scattering, absorption
