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透镜间隔的高精度在线测量 被引量:3

The High Precision On-line Measurement of Lens-to-lens Interval
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摘要 介绍了一种物镜透镜间隔非接触式测量系统。适用于平场复消色差物镜等高性能物镜的生产。文中详细叙述了测量原理、结构和精度分析。最大测量误差不超过±2μm。 A non-contact system for measuring lens-to-lens interval is presented in this paper. It is used for manufacture of high quality objective lens. The measurement principle, the structure and the analysis of error are described in detail. The maximum measurement error is less than ±2μm.
出处 《光学仪器》 1992年第3期20-24,共5页 Optical Instruments
关键词 透镜间隔 高精度 在线测量 Lens-to-lens interval
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参考文献1

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同被引文献39

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