摘要
提出了一种干涉相位差与检偏器方位角成线性关系的新型微分干涉显微镜,利用相移干涉技术,可定量测量样品的表面形貌及粗糙度参数,系统的垂直和横向分辨率分别为1nm和0.5μm。
A new type of differential interference microscope has been developed. The phase difference between two interfering beams m the microscope is linear with the azimuth angle of an analyzer. Using PSI(phase shifting interferomerry), the microscope provides quantitative determination of surface topography and surface roughness. The vertical resolution of the instrument is better than 1nm and its lateral resolution is less than 0.5um.
出处
《光学仪器》
1992年第5期1-5,共5页
Optical Instruments
关键词
微分干涉
显微镜
旋转检偏器
Differential Interference Microscope, Surface Topography, Phase Shifting Interferometry
