高g值MEMS加速度传感器敏感元件的结构分析

Analyse of the Structure of Sensing Elements of High g-Force MEMS Accelerometers

介绍了几种高 g值 MEMS加速度传感器敏感元件的结构和原理 ,并对其结构特性进行了分析 ,最后给出了研究过程中所采用的圆膜片结构和仿真结果。

In this paper, micro mechanical structure of sensing elements of several high g force MEMS accelerometers is analyzed; their characteristics are discussed. Finally, a structure that we researched is given. this structure is a kind of round membrane.