用于微电子制造的高速高精度运动系统关键技术

Key technologies of high speed and high precision motion systemfor microelectronic manufacture

从机构设计、驱动方式、控制策略以及实时监测等方面对用于微电子制造的高速高精度运动系统关键技术进行综述。提出有待深入研究的方向:1)并联机构在系统中的应用;2)解决柔性结构振动问题的控制策略;3)用于实时动态全闭环控制模式的视觉伺服技术。

The design, driver, control strategy and real time monitor of high speed and highprecision motion system are reviewed in the paper and some aspects to be researched are presented,namely, 1) the application of parallel mechanism in the high speed and high precision motion system,2) the control strategy for vibration abatement of flexible structure, 3) visual servo for real time anddynamic closed loop system.