热压ITO靶材微观组织的电镜观察

The observation of transmission ele ctron microscopy for the microstructure of hot pressed ITO target

观察比较了两种热压工艺制造的ITO靶材的微观组织.观察结果显示:两种工艺制造的ITO靶材的微组织大不相同.符合技术要求的靶材(试样Hy—1,Hy—2,Hy—3)微观组织致密且晶界平直,无任何析出物;而材在造成其有缺陷的温度条件下(试样Hy—5,Hy—7,Hy—9)均可观察到有液相形成,并因液相润湿晶界后退湿不完全而在晶界上形成In,Sn和SnO2析出物,同时在靶材中还存在大量晶界反应不完全.两种靶材微观组的不同还导致其力学性能产生显著变化,前者的抗弯强度可达到227～244MPa,而后者的抗弯强度却只有6287Mpa.

Two kinds of microstructures of hot p ressed ITO target by transmission electron microscopy are compared in th e paper,and the discovery shows:under the su itable temperature,grain boundaries are straight and no second phase se parated out,its mi-crostructure is closed;but under th e certain temperature,the liquid -p hase is formed in the target,and some In,Sn and SnO 2 are separated out on the boundaries and s ome boundaries react incompletely,target cracked in the high temperatu re grade because the thermol expansion of In and Sn is different with main phase.The two different kinds of microstructures of targ et also lead obvious difference in mechanics property.S pecimen of Hy -1,Hy -2and Hy -3have high bending strength from 227MPa to 244MPa,but the other group(Hy -5,Hy -7and Hy -9)has lower bending strength from 62MP a to 87MPa.