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离子束辅助沉积钼酸铅晶体表面红外增透膜 被引量:2

Preparation of infrared antireflection coating on PbMoO_4 substrateby using ion-assisted deposition technology
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摘要 由于钼酸铅晶体具有优异的机械特性、光学特性及较高的声光品质因数,故采用离子束辅助沉积技术,在钼酸铅晶体表面制备了宽带红外增透膜。文章简单介绍了镀膜设备的改造特点,并对整个工艺过程进行了分析研究。试验表明所镀膜层的光学特性及膜层品质大大提高,在光纤通信领域具有广阔的应用前景。 PbMoO4 single crystal has excellent mechanical and optical properties and higher acoustics figure,and the broadband infrared antireflection coating on PbMoO4 single crystal has been made by using the ionassisted deposition technology. The characteristics of the coating machine are introduced simply and the coating process are analyzed. A series of measurements suggest that the optical performance and coating quality have been improved drastically and this kind of coating will be widely used in the fiber optical communication industries.
出处 《合肥工业大学学报(自然科学版)》 CAS CSCD 2003年第2期242-245,共4页 Journal of Hefei University of Technology:Natural Science
关键词 离子束辅助沉积 钼酸铅晶体 红外增透膜 真空系统 光学性能 膜层稳定性 透射率 ion-assisted deposition(IAD) PbMoO_4 single crystal infrared antireflection coating vacuum system
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