紫外预电离TEA CO_2激光器放电特性的研究

Investigations of a UV Preionized TEA CO_2 Laser and Discharge Characteristics

本文叙述自制的TEA CO_2打标记激光器的主放电回路,建立了理论模型,利用数值分析法对预电离和主放电过程分别进行了理论计算,得到了放电电压、放电电流及电子浓度等参量的变化波形。实验结果表明,理论模型基本合理。

The performances of aTEA CO_2 laser for laser marking system is described. In accordance with the main discharge circuit of this device, we set up a theoretical discharge equivalent circuit model of TEA CO_2 laser. Using digital analysis methods, we have done some theoretical calculations of preionization process and main discharge process respectively. The waveforms, of some parameters, such as discharge voltage, discharge current and electron concent are obtained. The experimental results show that theoretical model is reasonable on the whole.