摘要
表面光电压法 (SPV)是一种高灵敏度的、非破坏性的在线监控技术。能精确测量硅片的少子扩散长度、少子寿命、重金属沾污浓度等参数。对 IC生产的质量保证是非常重要的检测手段。文中介绍了用于监控 IC生产栅氧化层和氧化炉管系统的 SPV技术 ,并讨论了铁以外其它沾污的 SPV检测。
The Surface Photovoltage (SPV) method, which can be used to detect the minority carrier diffusion length,lifetime, and heavy metal contamination level accurately, is an effective technique of high sensibility and no destruction to monitor the characteristics of the wafer in line and is also an effective method to exam the quality of devices in IC manufacturing.We adopted the SPV method to monitor the gate oxide and the oxidation furnace system and discussed the examination for other contamination detected by this method in this paper.
出处
《固体电子学研究与进展》
CAS
CSCD
北大核心
2003年第1期120-125,共6页
Research & Progress of SSE
