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用于IC氧化层和氧化炉管在线监控的表面光电压技术 被引量:1

The Application of Surface Photovoltage Technology in Monitoring Gate Oxide and Oxidation Furnace System
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摘要 表面光电压法 (SPV)是一种高灵敏度的、非破坏性的在线监控技术。能精确测量硅片的少子扩散长度、少子寿命、重金属沾污浓度等参数。对 IC生产的质量保证是非常重要的检测手段。文中介绍了用于监控 IC生产栅氧化层和氧化炉管系统的 SPV技术 ,并讨论了铁以外其它沾污的 SPV检测。 The Surface Photovoltage (SPV) method, which can be used to detect the minority carrier diffusion length,lifetime, and heavy metal contamination level accurately, is an effective technique of high sensibility and no destruction to monitor the characteristics of the wafer in line and is also an effective method to exam the quality of devices in IC manufacturing.We adopted the SPV method to monitor the gate oxide and the oxidation furnace system and discussed the examination for other contamination detected by this method in this paper.
出处 《固体电子学研究与进展》 CAS CSCD 北大核心 2003年第1期120-125,共6页 Research & Progress of SSE
关键词 表面光电压 金属沾污 在线监控 SPV 集成电路 氧化层 氧化炉管 surface photovoltage metal contamination monitor online
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  • 4LAGOWSKI, JACEK J. Method and apparatus for determining the minority carrier diffusion length from linear constant photon flux photovoltage measurements: United States Patent, 5025145 [P]. 1991 - 06- 18.
  • 5屠海令,朱悟新,王敬,周旗钢,张椿,孙燕.表面光电压测量P型硅抛光片少子扩散长度及铁杂质含量的研究[J].Journal of Semiconductors,1999,20(3):237-241. 被引量:3
  • 6罗俊一,沈益军,李刚,刘培东,张锦心,包宗明,黄宜平.表面光电压法研究抛光硅片制造中铁沾污的来源[J].材料科学与工程,2001,19(1):70-72. 被引量:4

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