摘要
生物去除法是利用微生物代谢过程中一些复杂的生化反应来达到去除多余材料,加工出其它微细加工方法不能加工出的微小结构。阐述了用氧化亚铁硫杆菌作为生物氧化剂,刻蚀以铜及铜合金为材料的基片表面,得到精细三维结构的原理和方法,并总结了这种新型加工方法的一些优缺点。为了改善生物刻蚀的三维结构的质量,在提高其加工精度及生物加工机理方面正进行着更深入的研究。
The biological machining is a technique which uses the complex biochemical reaction during the metabolic process of the microoganism to remove the extra materials and to fabricate the micro structure that couldn't be obtained by other microfabrication techniques. The thiobacillus ferrooxidants is used as biologic oxidant to etch the surface of the copper or copper alloy substrates to obtain the elaborate threedimensional structure. The principle and procedure of this new technique are described. Its advantages and disadvantages are also summarized. In order to improve the quality of the structure the further studies on improving the process precision and on the mechanism of the biological machining should be carried out.
出处
《微细加工技术》
2003年第1期5-8,39,共5页
Microfabrication Technology
关键词
微细加工
光刻
氧化亚铁硫杆菌
生物刻蚀
micro-machining
lithography
thiobacillus ferrooxidants
biologic etch
