以LaNiO_3作为底电极的Pb(Zr_(0.3),Ti_(0.7))O_3铁电薄膜的性能研究

The study of the Pb(Zr_(0.3),Ti_(0.7))O_3 ferroelectric thin films with the LaNiO_3 thin films as the bottom electrode

采用溶胶—凝胶法在Si(100)衬底上制备了LaNiO3薄膜,采用相同方法在LaNiO3/Si(100)上制备了Pb(Zr0.3,Ti0.7)O3薄膜,对LaNiO3薄膜和Pb(Zr0.3,Ti0.7)O3薄膜的结晶性,表面形貌和电性能进行了研究.

LaNiO3 thin films were prepared on Si(100) substrates using sol-gel technique, and Pb(Zr0.3,Ti0.7)O3 thin films were prepared on LaNiO3/Si(100) substrates with the same method. The crystallinity, surface morphology and electric properties of the LaNiO3 and Pb(Zr0.3,Ti0.7)O3 thin films were studied.