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入射角对激光散斑测量表面粗糙度的影响 被引量:3

Influence of Incidence Angle on the Measurement of Surface Roughness by Laser Speckle
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摘要 观察了当相干激光以不同入射角照射 4个等级的平磨和外圆磨样块时记录的散斑图像中散斑强度的变化。通过分析可知对比度与表面粗糙度之间存在密切的关系 ,入射角又直接影响对比度 ,不同的入射角适合不同的加工方法和测量范围。 Incidence angle has some influences on the speckle intensity. According to the observation on the changes of speckle intensity, irradiated by laser from different incident angles to 4 level flat lapped and ground samples, it brings the result that the incidence angle is changed in different measurement range and a reasonable incidence angle may improve the precision and range of measurement.
出处 《中国机械工程》 EI CAS CSCD 北大核心 2003年第7期563-564,共2页 China Mechanical Engineering
关键词 入射角 表面粗糙度 激光散斑 对比度 激光测量 incidence angle surface roughness laser speckle contrast
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参考文献3

  • 1[1]Wong P L,Li K Y. In-process Roughness Measurement on Moving Surfaces. Optical and Laser in Engineering, 1999,31(6):543~548
  • 2[2]Leonard L C,Toal V. Roughness Measurement of Metallic Surfaces Based on the Laser Speckle Contrast Method. Optics and Lasers in Engineering,1998,30(5):433~440
  • 3[3]Toh S L,Shang H M,Tay C J. Surface-roughness Study Using Laser Speckle Method. Optics and Lasers in Engineering,1998,29(3):217~225

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