纳弧度分辨力角位移传感器及平均灵敏度标定

Angular displacement sensor with nano-radian resolution and calibration techniques of mean sensitivity

给出了基于六次临界反射棱镜的精密角位移传感器,采用的是差动式结构。实验结果表明,传感器灵敏度高,量程为500μrad,具有5nrad的分辨力。提出了适合于小量程角位移传感器的平均灵敏度的标定方法,可以快速标定平均灵敏度,降低标定过程中标定系统及传感器自身漂移对标定精度的影响。

A highprecision angular displacement sensor using critical angle prisms is presented. Experimental results show that sensitivity of the sensor is high, and the measurement range of the sensors is 500μrad with measurement resolution of 5nrad. A new method for calibrating precision angular displacement sensor with small measurement range is developed. The effects of output drift of the calibratioln system and sensor on calibration accuracy of the sensor can be reduced by this method.