三明治结构微机械静电伺服加速度计稳定性研究

Stability of Micromachined Electrostatic Servo-accelerometer with Sandwich Structure

对影响微加速度计稳定性的主要因素(外置偏压和横向加速度干扰)进行了详细分析,给出了最小临界偏压和最大可承受横向加速度的计算公式,提出一种具有良好稳定性的四梁中心悬臂式结构。根据Matlab仿真结果,在大量程微加速度计典型结构参数下,惯性敏感单元可承受的最大横向加速度达2 000g以上,远远满足实际需求。

In this paper the applied bias voltage and the lateral accelerations disturbance are analyzed in detail, which is the main factor that influences the stability of micro-accelerometer. The calculation formulas of minimum critical voltage and maximum allowable lateral acceleration are given. The structure of the seismic mass is proposed, which has four central suspension beams and is more stable. According to the simulation results by Matlab tools, the maximum allowable lateral acceleration to inertial sensitive unit is larger than 2 000g in the typical structural parameters of micro-accelerometer with large measurement range, which meets the requirements by a large margin.