半导体光刻技术在生物芯片制作中的应用

Application of Semiconductor Photolithography in Biochip Fabrication

以生物芯片及其制作过程来重点介绍采用半导体光刻技术制作基因芯片 ,通过与传统光引导合成法的比较 ,表明了这种方法在制作高密度寡聚核苷酸上的优越性 ,其探针特征尺寸可望达到 1μm,并阐明了其原因。

This paper introduces the principle and fabrication of biochip, and lays emphasis on the application of semiconductor photolithography in DNA chips. The advantage of this method can be seen by contrast with the traditional in situ light directed synthesis and its probe feature size is approaching 1 μm.The explanation is given at last.