摘要
作为一类新型 L CD技术的 LCo S显示屏是一种反射式液晶显示器 ,其镜面反射电极的平整性决定了整个显示器的亮度和对比度等主要显示参数。本文详细讨论了 CMP技术在LCo
LCoS panel as a kind of new LCD is a sort of liquid crystal display devices that operate in a reflective mode. And the planarization scale of the reflective mirror electrode is always modulating those key parameters of the microdisplay, such as lightness, contrast etc. In this paper, the principle on how to realize planarization in liquid crystal on silicon with CMP technology is discussed in detail.
出处
《光电子技术》
CAS
2003年第1期41-45,共5页
Optoelectronic Technology
