SMIF隔离技术的洁净微环境——洁净技术的新发展

SMIF Isolation Technology for the Mini Environment Clean Room——New Development of the Air Clean Technology

叙述了当今世界空气净化的新概念--SMIF隔离技术。介绍了该项技术的国内研究发展情况。并以详细的技术对比数据显示了SMIF技术将成为21世纪高级别空气净化的主流。

This paper describes the new development concept of the air clean technology--SMIF isolation technology and introducing the result of our research in this area.By the detail technical date the SMIF technology will become as a main stream in the high class air clean area.