摘要
随着大规模集成电路和太阳能光伏电池的飞速发展,越来越多的TDR-70A型单晶炉投入了市场应用,为了充分发挥设备的能力,有必要对设备的维护及故障的排除有更深的了解,结合设备的结构特点阐述了TDR-70A型单晶炉的维护与常见故障分析,供大家参考。
As a result of big size IC and solar recover cell speediness development, more and more TDR - 70A crystal growth equipment jump in market. For equipment capability exert, the equipment' s maintenance must needs. The paper expounds TDR - 70 A crystal growth equipment s maintenance, for reference to consumer.
出处
《电子工业专用设备》
2003年第1期51-56,共6页
Equipment for Electronic Products Manufacturing
