硅基多孔氧化铝膜的整体发光及其化学修饰

Photoluminescence and Chemical Modification of Silicon-based Porous Alumina

利用电子束蒸发技术在硅衬底上沉积了 5 0 0nm厚的铝膜 ,分别在硫酸、磷酸和草酸中通过阳极氧化技术制备了硅基多孔氧化铝模板 .通过透射电镜 (TEM)观测了形貌 ,并测定了它们的光致发光光谱 (PL) .结果表明利用不同的酸性电解质得到的多孔氧化铝模板的发光现象是不完全相同的 .基于这种思路 ,采用了其它的酸性电解质磺基水杨酸或在酸性电解质中预先加入有机荧光物质罗丹明 6G ,得到了不同发光特性的硅基多孔氧化铝膜 .结合过去的理论 ,对上述荧光光谱的来源以及变化进行了讨论 .多孔氧化铝的发光一般都来自于与氧空位有关的缺陷态F+,但它的复合过程会受到体系中的杂质能级或其它发光物质的影响 .来自电解质中的物质在阳极氧化的过程中会参与氧化铝膜的形成 ,进而改变氧化铝膜的成分 。

Aluminum films of 500 nm thickness were evaporated on silicon substrate by electron beam technique. Then silicon-based porous anodic aluminum oxide films were prepared by anodization in traditional H2SO4, H3PO4 and H2C2O4, respectively. The structures of some samples were investigated by transmission electron microscopy (TEM) observation. It was found that photoluminescence (PL) spectra of the films prepared in various electrolytes presented different emission properties. Based on this result, another electrolyte, sulfosalicylic acid was used and a kind of laser dye, rhodamine 6G was also added in advance in H2C2O4 solution to, prepare. Si-based alumina films. Both of them showed characteristic PL properties. According to previous theories of the PL mechanism of porous alumina, it, has been suggested that luminescence centers of the alumina films, which usually originate from the F+ center, could be affected by the local structure related, to the components incorporated in the films. Rose species coming from the electrolyte will be responsible for the varied emissions.