摘要
采用真空磁过滤电弧离子镀法分别在9Cr18和40CrNiMo钢上沉积厚约为0.2μm的类金刚石(DLC)膜.为了检测成膜质量,分别使用纳米压痕和纳米划痕技术表征钢基材和DLC/基材的机械性能.对这种亚微米厚的膜,纳米压痕技术和纳米划痕技术能提供丰富的近表面的弹塑性变形、断裂和摩擦等的信息.同DLC/40CrNiMo相比,DLC/9Cr18的硬度高和固体润滑效果显著,9Cr18是较为理想的基体材料.
DLC coatings of 0.2μm thick were deposited by vacuum magneticfiltering arc plasma deposition on 9Cr18 and 40CrNiMO steels. To check the qualities of DLC coating on different steels, nanoindentations and nanoscratches were produced with suitable scratchers and by a broad range of applied load. Mechanical behaviors of these submicrom thin coatings were investigated and interpreted. It is shown that nanoindentation and nanoscratch tests can provide more information about the nearsurface elasticplastic deformation, fracture, friction properties. Compared with DLC/40CrNiMo, the hardness and solid lubricating effects for DLC/9Cr18 are very marked. 9Cr18 is an ideal base materical for DLC films.
出处
《实验力学》
CSCD
北大核心
2003年第1期1-5,共5页
Journal of Experimental Mechanics
基金
国家自然科学基金资助项目(No.10242001
10172086)
中科院知识创新工程重要方向项目KJCX2-SW-L2
关键词
真空磁过滤电弧离子镀
DLC膜
纳米压痕
纳米划痕
固体润滑
vacuum magnetic-filtering arc plasma deposition
DLC coatings
nanoindentation, nanoscratch
solid lubricating