真空磁过滤电弧离子镀法制备DLC膜的机械性能

Mechanical Properties of DLC Films Deposited by Vacuum Magnetic-filtering Arc Plasma

采用真空磁过滤电弧离子镀法分别在9Cr18和40CrNiMo钢上沉积厚约为0.2μm的类金刚石(DLC)膜.为了检测成膜质量,分别使用纳米压痕和纳米划痕技术表征钢基材和DLC/基材的机械性能.对这种亚微米厚的膜,纳米压痕技术和纳米划痕技术能提供丰富的近表面的弹塑性变形、断裂和摩擦等的信息.同DLC/40CrNiMo相比,DLC/9Cr18的硬度高和固体润滑效果显著,9Cr18是较为理想的基体材料.

DLC coatings of 0.2μm thick were deposited by vacuum magneticfiltering arc plasma deposition on 9Cr18 and 40CrNiMO steels. To check the qualities of DLC coating on different steels, nanoindentations and nanoscratches were produced with suitable scratchers and by a broad range of applied load. Mechanical behaviors of these submicrom thin coatings were investigated and interpreted. It is shown that nanoindentation and nanoscratch tests can provide more information about the nearsurface elasticplastic deformation, fracture, friction properties. Compared with DLC/40CrNiMo, the hardness and solid lubricating effects for DLC/9Cr18 are very marked. 9Cr18 is an ideal base materical for DLC films.