影响XeCl准分子激光器寿命的因素

The Factors Affecting the Lifetime of XeCl Excimer Laser

准分子激光器的推广应用与其寿命的改善有着很密切的关系。现以XeCl准分子激光器为例讨论了对激光器寿命影响比较大的两大因素

The improvement of lifetime plays important role in application and popularization of excimer lasers.Examplfying the discharge pumped XeCl excimer lasers, the laser charmber and the fast switch which have strong influence on excimer laser lifetime has been discussed.