支承电压与电压变化速率对静电轴承性能影响的研究

INFLUENCES OF SUSPENSIONVOLTAGE AND ITS SLEW RATE ON THEPERFORMANCE OF ELECTROSTATICBEARINGS

从机电耦合的角度研究了静电轴承中高压放大器的输出电压和电压变化速率对系统性能的影响。分析表明,支承电压的选择应结合承载能力、转子不平衡力抑制和对输出电压惰性失真的要求确定,支承电压变化速率与高压放大器的动态功耗相互制约。导出了确定支承电压及其变化速率的关系式,为系统设计提供了理论依据。理论分析结果与实例的试验结果取得了较好的一致性。

Electrostatic bearings are subject to performance limits which are commonly resulted from the limited suspension voltage and its slew rate supplied by high-voltage amplifiers. The choice of the suspension voltage has to satisfy various demands and its final solution, according to the analytical results, is determined by the requirements of load capacity, unbalanced force suppression, and voltage distortion. Meanwhile, the force slew rate which is limited by the power consumption of high-voltage amplifiers introduces nonlinear behaviors. The problem of identifying the suspension voltage and its slew rate when used in an electrostatic bearing with a known structure subject to a known load is solved by the derived equations.