期刊文献+
任意字段
题名或关键词
题名
关键词
文摘
作者
第一作者
机构
刊名
分类号
参考文献
作者简介
基金资助
栏目信息

掩膜法制备薄膜电感 被引量：1

Film inductors prepared with masks
原文传递
导出
摘要 采用掩膜方法制备了栅极型薄膜电感,并测试了这些薄膜电感的电感值和品质因数(Q值)在100MHz-10GHz范围的频谱特性。在此频率范围内,两种样品的电感值显示了平稳的频率特性,其数值分别为130nH,155nH;电阻在6GHz以下也保持平稳,分别为31Ω,51Ω,在这个频率以上,由于高频趋肤效应而有一定的增大;Q值在1-6GHz之间在20以上,并且在6GHz附近分别达到最大值160和110。在100MHz-10GHz范围内,这些电学参量的频谱特性符合实际应用的需要。 The thin film inductors of meander-type were prepared by using the masks. Frequency-dependences of inductance and quality factor (Q value) for the thin film inductors were studied in arange of 100MHz-10GHz. The inductance for the two samples show flatness in the tested frequency range and the values are 130nH and 155nH. Under 6GHz, the resistance of samples are 31Ωand 51Ω; beyond 6GHz, they become higher due to the skin effect. The quality values are over 20 from 1GHz to 6GHz,the max value are 160 and 110 at about 6GHz. It shows that frequency characteristics of thesefactors can meet the application requirements in the range of 100MHz-10GHz.
作者 邵新勋 狄国庆
机构地区 苏州大学物理系
出处 《功能材料与器件学报》 CAS CSCD 2003年第1期39-42,共4页 Journal of Functional Materials and Devices
关键词 薄膜电感 栅极型 磁控溅射 品质因数 film inductor meander type magnetron sputtering quality factor
分类号 TN405 [电子电信—微电子学与固体电子学] TM55 [电气工程—电器]
  • 相关文献

参考文献8

  • 1[1]Kawabe K, Koyam H, Shirae K. Planar Inductor [J]. IEEE Transactions on Magnetics, 1984, Mag- 20(5): 1804- 1806.
  • 2范平.超薄金属膜的电导特性[J].金属学报,1999,35(3):261-264. 被引量：8
  • 3[5]Yamaguchi M,Matsumoto M,Ohzeki H, et al. Fabrication and Basic Characteristics of Dry Micro Inductors [J]. IEEE Transactions on Magnetics,1990, 26(5):
  • 4[6]Yamaguchi M, Arai K I. Current Status and Future Prospects of RF Integrated Inductors[J]. Journal of the Magnetics Society of Japan, 2001, 25(2).
  • 5[7]Arai K I. Applied Magnetics 3 [J]. Journal of the Mag- netics Society of Japan, 2000, 24(8):1198- 1203.
  • 6[8]Takada K,Hori Y,Furukawa H,et al.Structural Design of Thin- film Spiral Inductors for MHz Devices [J]. Journal of the Magnetics Society of Japan, 2001, 25(4- 2):
  • 7[9]Waseem A Roshen,David E Turcotte. A new Planar Inductor with Magnetic Closed Circuit [J]. IEEE Transactions on Magnetics,1988,24(6):3213- 3216.
  • 8[10]Shirakawa K,Kurata H,Toriu J,et al.[J]. IEEE Trans- actions on Magnetics, 1991, 27(6):5432- 5434.

二级参考文献6

  • 1唐兆麟 黄荣芳 等.－[J].金属学报,1996,32:308-308.
  • 2董正超，物理学报，1997年，46卷，568页
  • 3唐兆麟，金属学报，1996年，32卷，308页
  • 4Sheng L，Phys Rev B，1995年，51卷，7325页
  • 5王力衡，薄膜技术，1991年，70页
  • 6董正超,盛利,邢定钰,董锦明.金属薄膜的量子输运理论[J].物理学报,1997,46(3):568-578. 被引量：10

共引文献7

同被引文献15

  • 1郭大元.微波自动测量线的建立[J].实验技术与管理,2005,22(1):43-47. 被引量：7
  • 2Leibl M, Kolar J W. Comparative Analysis of Inductor Concepts for High Peak Load Low Duty Cycle Operation[-C3//International Power Electronics Conference. 2014:899-906.
  • 3Aoki Y, Shimizu S, Honjo K. Novel Design Method for Electrical- ly Symmetric High-Q Inductor Fabricated Using Wafer-Level CSP TeehnologyFJ3. IEEE Transactions On Components: Packaging Technology,2013,3 (1) :31-39.
  • 4Li Xiling,Chai Guozhi, Guo Dangwei,et al. Increasing the thin film inductance by using soft magnetic Co92 Zr8 as eonductor[J] Micro- electronic Engineering, 2009,86 ( 11 ) : 2290 -2292.
  • 5Hsu R, Muthukumar S, Zheng Guizhen, et al. 3-D Integrated In- ductor on Silicon Backend Using Compliant Interconnect Process for 10GHz Low Jitter VCO Application[-C~//Electronie Components and Technology Conference. 2006..541-546.
  • 6Hwu K I, Hsiao C W. Inductor Saturation Detection with Anti- Saturation Control Strategy Applied[-G~. Department of Electrical Engineering, National Taipei University of Technology, 2013: 266-270.
  • 7Patrick Yue C, Wong S. Simon. On-Chip Spiral Inductors with Patterned Ground Shields for Si-Based RF IC' s[-J']. IEEE Journal Of Solid-state Circuits, 1998,33 (5) : 743-752.
  • 8Sujin Seo, Namsik Ryu, Heungjae Choi, et al. Novel High-Q In- ductor using Active Inductor Structure and Feedback Parallel Res- onance Circuit[G']. Dept of Information ~ Communi- cation Engi- neering, Chonbuk National University, 2007 : 467-470.
  • 9Papantonis S, Ridler N M, Lueyszyn S. A New Technique for Vector Network Analyzer Calibration Verification Using a Single Reconfigurable Device[-C~//IEEE Conference Publications. 2013: 1-3.
  • 10Henze A, Tempone N, Monasterios G, et al. Incomplete 2-Port Vector Network Analyzer Calibration Methods[-G']. IEEF- Bienni- al Congress of Argentina, 2014 : 810-815.

引证文献1

二级引证文献3

功能材料与器件学报
2003年 第1期

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部