基于集总参数建模的微型镊子推杆设计

Design of micro push-rod based on lumped parameter modeling

在微操作领域,微结构中较大的粘附力使快速精确地发射微小物体成为一个长期的挑战。本文介绍一种用于微型镊子的推杆,利用推杆撞击微小的物体使其获得足够的动能去克服粘附力。文中对推杆的结构进行了设计,采用梳状静电驱动执行器控制推杆动作,利用集总参数建模建立了推杆运动的控制方程,借助MATLAB仿真方法分析了推杆运动运动位移与驱动电压的曲线,仿真结果与理论设计值有较高的一致性。利用本文的推杆结构,可以改善现有微型镊子的缺陷,为亚微米粒子的操作提供了有效的解决方案。文中采用的集总参数建模及仿真分析方法,可供梳齿静电驱动系统设计参考。

In the field of micro-manipulation,the large adhesion force in micro-structures makes it a long-term challenge to launch micro-objects quickly and accurately.In this paper,a micro push-rod for micro tweezers is introduced.The push rod collides with small object and gives it enough kinetic energy to overcome the adhesion force.The push-rod is controlled by the comb electrostatic actuator.The control equation of the motion of the push-rod is established by lumped parameter modeling.The curve of the displacement and driving voltage of the push-rod is analyzed by means of MATLAB simulation method.The simulation results are in good agreement with the theoretical design values.Using the push rod structure,the shortcomings of the existing micro tweezers can be improved,and an effective solution for the operation of sub-micron particles can be provided.The lumped parameter modeling and simulation analysis method adopted in this paper can be used as a reference for the design of comb electrostatic drive system.