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GaN基器件中的欧姆接触 被引量:3

Ohmic Contacts in GaN-based Devices
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摘要 GaN材料以其优良的光电性质,已成为制造发光器件和高温大功率器件的最有前途的材料。欧姆接触是制备GaN基器件的关键技术之一。着重论述了在n-GaN和p-GaN上制备欧姆接触的研究现状。 Gallium nitride has become one of the most attractive materials for light emitting devices and high-temperature and high-power devices,due to its superior opto-electronic properties. Ohmic contact is a critical technology for preparing GaN based devices. In this paper,research progress in ohmic contacts in n-GaN and p-GaN is presented emphatically.
出处 《材料导报》 EI CAS CSCD 2003年第3期38-40,44,共4页 Materials Reports
基金 国家重大基础研究项目基金(编号No.G2000068306)
关键词 GaN基器件 氮化镓 欧姆接触 接触电阻率 半导体材料 电子器件 发光器件 微波器件 GaN,ohmic contact ,specific contact resistance
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同被引文献63

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