摘要
介绍了集散控制 MOCVD 系统的研究和应用。该设备是生长半导体材料 GaN 的关键设备。文中重点探讨了用 PLC 实现该设备的控制系统,并给出了硬件设计和工控软件的应用。
In this paper,the application and research of control system in the MOCVD device are presented.The MOCVD is the key device to grow semi-conductor GaN.This paper is focused on the design of the device's control system by using PLC.And the application of industry control software and hardware design in the MOCVD system is described also.
出处
《电工技术》
2003年第1期33-34,共2页
Electric Engineering
