摘要
在一台УВНИПА 1型双激发源等离子弧薄膜沉积装置上制取TiN Ti DLC、及其含有软金属Cu或PTFE覆盖膜的多层复合涂层。摩擦磨损试验在一台球 盘滑动磨损试验机上进行。结果表明,以TiN和DLC膜为主体的多层复合涂层具有较高的摩擦学特性,过渡金属钛层、软金属和聚四氟乙烯覆盖层可以降低摩擦系数33%～50%,对磨擦表面磨损减少90%。
TiNTiDLC, TiNTiDLCCu and TiNTiDLCPTFE etc multilayer films were prepared with a УВНИПА1 deposition device by dualexcitation energy source. Tribological tests were carried out on a balldisk friction and wear tester. The results show that the multilayer coatings on the basis TiN and DLC film possess high tribological properties; transition metal Ti film, overlayer of the soft metal Cu and Pb, PTFE film can reduce the friction coefficient 33%～50% times, wear rate of GCr15 ball surface decrease 90% times.
出处
《南京工业大学学报（自然科学版）》
CAS
2003年第2期1-5,共5页
Journal of Nanjing Tech University(Natural Science Edition)
基金
教育部国家重点实验室高访基金合作项目
教育部留学回国人员科研启动基金
江苏省博士后基金
关键词
TiN
DLC膜
复合涂层
摩擦系数
磨损率
TiN
DLC film
multilayer coatings
friction coefficient
wear rate
