摘要
综合介绍了气敏传感器的种类及其近期的发展以及MEMS技术对气敏传感器的推动,并着重对声表面波(SAW)气敏传感器及石英微天平(QCM)气敏传感器的结构、工作原理和涂层材料作了详细的介绍。
Some aspects of gas sensors are discussed in this paper,including their types,recent developments
and effects of MEMS on gas sensors.The structure,principle and coating material of SAW and QCM gas senors are presented in detail.
出处
《材料导报》
EI
CAS
CSCD
2003年第1期33-35,共3页
Materials Reports