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Micromechanical Tunable Optical Filter 被引量：2

微机械可调谐滤波器的研制(英文)
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摘要 A micromachined vertical cavity tunable filter with AlGaAs/GaAs distributed Bragg reflector is presented.This filter can be electrostatic tuning over a range of 28nm with an applied voltage of 7V. 利用 Ga As/Al Ga As分布反馈 Bragg反射镜在 Ga As衬底上制作了一个微机械的调谐滤波器 .该器件在 7V调谐电压下调谐范围达 2 8nm.
作者 张瑞康 杨晓红 周震 徐应强 张玮 杜云 黄永清 任晓敏 牛智川 吴荣汉
机构地区 北京邮电大学 中国科学院半导体研究所
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2003年第4期347-350,共4页 半导体学报（英文版）
基金 国家自然科学基金 (批准号 :90 10 40 0 3 60 13 70 2 0 ) 国家高技术研究发展计划 ( No.2 0 0 2 AA3 12 2 9Z) 国家重点基础研究发展规划 ( No.G2 0 0 0 0 3 660 3 )资助项目~~
关键词 micromachined tunable filter wavelength division multiplexing distributed Bragg reflector PACC:5200F 5200H 8160C 微机械可调谐滤波器 波分复用 分布反馈Bragg反射镜 砷化镓
分类号 TN713 [电子电信—电路与系统]
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参考文献10

  • 1Spisser A,Ledantec R,Seassal C,etal.Highly selective1.55μm InP/air gap micromachine F-P filter for opticalcommunications.IEEE Photonics Technol Lett,1998,10(9):1259
  • 2Vsil E C,Wu M S,Li G S,et al.GaAs micromachined widely tunable fabry-perotfilters.Electron Lett,1995,31(3):228
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同被引文献14

  • 1L. Caruso, I. Montrosset. Analysis of a racetrack microring resonator with MMI coupler[J]. J. Lightwave Technol. , 2003, 21(1) : 206.
  • 2J. Y. Yang, Q. j. Zhou, F. Zhao. Characteristics of optical bandpass filters employing series-easeaded double-ring resonator [J]. Opt. Commun. , 2003, 228(1-3): 91-98.
  • 3J. Heebner, R. Grover, T. Ibrahim. Optical Microresonators Theory, Fabrication and Applications[M]. New York: Springer, 2003.
  • 4C. K. Mandsen, J. H. Zhao. Optical Filter Desing and Analysis:A Signal Processing Approach[M]. Wiley. 1999.
  • 5S. C. Hagness, D. Rafizadeh, S. T. Ho et al.. FDTD microcavity simulations: design and experimental realization of waveguide-coupled single-mode ring and whispering-gallery-mode disk resonators [J]. J. Lightwave Technol. , 15 ( 11 ) : 2154-2165.
  • 6B. E. Litter, S. T. Chu, P. P. Absil et al.. Very high order microring resonator filter for WDM applieation [J]. IEEE Photon. Technol. Lett., 2004, 16(10): 2263-2265.
  • 7J. V. Hryniewicz, P. P. Absil, B. E. Little et al.. Higher order filter response in coupled microring resonators[J]. IEEE Photon. Technol. Lett., 2000, 12(3): 320-322.
  • 8许鸥,鲁韶华,董小伟,裴丽,简水生.基于微环谐振器阵列与马赫-曾德尔干涉仪的反射型滤波器性能分析[J].光学学报,2007,27(8):1443-1448. 被引量：11
  • 9SALEH M A A, STONE J. Two-stage Fabry-Perot filters as demultiplexers in optical FDMA LAN's [ J]. J Lightwave Technol, 1989,7(2) :323 ～330.
  • 10VSIL E C, WU M, LI G S. GaAs micromachined widely tunable Fabry-Perot filters [ J ]. Electron Lett, 1995,31 (3) :228 ～ 230.

引证文献2

二级引证文献13

Journal of Semiconductors
2003年 第4期

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