摘要
对采用 MEMS开关的 E类放大器进行了原型仿真 ,并且通过工艺流片制作 MEMS开关 ,搭建 E类放大器电路进行测试 .测试结果显示 ,这种机械式的放大器同样能实现有源放大器的功能 .测试得到的放大器实际效率与原型模拟结果一致 ,而放大器的功率增益高达 2 0 0 0 .
A class E amplifier can be constructed using either bipolar transistor or MEMS switch.Because of the intrinsic properties of MEMS switch,the amplifier may easily get high efficiency and high power gain.This concept is demonstrated by prototype design and measurement.The measured results show that the mechanical amplifier can act as the active amplifier,with the amplifier efficiency agrees well with the simulation result,and the amplifier power gain tested as high as 2000.
基金
信息产业部电子十三所砷化镓高速集成电路国防重点实验室 (批准号 :0 0 JS0 2 .7.1.JS0 2 0 6)
北京大学微米纳米加工技术国防科技重点实验室资助项目 (批准号 :0 0 S97.4.1.DJ2 3 0 6)~~
