摘要
通过测定CdSe室温核辐射探测器的伏安曲线和能谱特性,对探测器制作过程中的表面处理工艺进行了初步研究,结果表明通过适当的表面腐蚀和钝化处理,可以降低表面漏电流,减小探测器噪声,达到提高探测器能量分辨率的目的。
A study on the etching and passivation of CdSe wafers in the preparing process of CdSe detectors has been made by measuring the I—V curves and the ?ray spectra. The results indicate that the surface leakage current can be decreased only when proper etching and passivation have been employed, and meanwhile electric noise can also be suppressed and consequently the energy resolution of CdSe detectors can be improved.
出处
《核技术》
CAS
CSCD
北大核心
2003年第4期325-328,共4页
Nuclear Techniques
基金
教育部重点科技项目
高等学校骨干教师资助项目(1998-121)
