静态测量法在分析电镜高压系统故障中的应用

Aapplication of Static Measurement in Analyzing Aailure of High-voltage Electron Gun System in Electron Microscope

电子显微镜高压电子枪系统结构复杂 ,价格昂贵 ;故障分析判断难度大 ,维修风险高 .高压电子枪系统高压电缆开路故障主要表现为束流表无指示 ,主机无法正常工作 .通过对S - 5 70扫描电子显微镜高压电子枪系统高压电缆开路故障的分析 。

The high-voltage electron gun system in electron microscope is structurally complex and high costly.Analysis and judgment on its failure are very difficult,and the repairing is highly risky.The main symptoms of open-circuit failure of the high-voltage electron gun system are that there is no indication on the electron beam ampere-meter and that the electron microscope can't work mormally.By analyzing the open-circuit failure of the high-voltage electron gun system in the S-570 electron microscope,this paper presents the general methods and procedures for the application of static measure in analyzing failure of high-voltage electron gun system.