摘要
介绍了光电测微系统的基本原理及其构成,分析了该系统的关键环节即聚焦伺服系统,建立了音圈电机的数学模型。在此基础上,详细介绍了采用PID校正网络提高系统的稳定性和响应速度的方法,并用Matlab进行仿真,仿真效果令人满意。
In this paper, the basic principle and constitution of the optoelectronic micrometer( OM) are introduced. The focus servo system of the OM is analyzed and the mathematical model of the voice-coil motor is presented. Based on that, the method of improving the system's stability and response speed are introduced in detail, simulated by Matlab Language. The result of simulation is good.
出处
《微特电机》
北大核心
2002年第6期30-31,33,共3页
Small & Special Electrical Machines
