摘要
针对微加速度计摆片废品率高的问题,从摆片的加工工艺,分析了PWM数字微加速度计温度应力对摆片刚度的影响;发现当摆片工作在不同状态,在某些加工温差段,摆片的刚度出现奇异值,摆片变形已不再满足小变形条件,导致摆片无法正常工作。本文亦提出了改善措施。
In order to solve the PWM digital microaccelerometer high percentage of rejects, the effect of the temperature stress on the flake is discussed from the flake technology. In the different work states, the rigidity singular value of the flake is found in some temperature-distinction segments. It results in the flake not to work in the normal work state. Some improvement methods are given.
出处
《微纳电子技术》
CAS
2003年第2期23-26,共4页
Micronanoelectronic Technology
基金
中国物理研究院基金(909604H05)
西安电子科技大学青年科研工作站基金(2002001)
