酸增殖剂及其应用

Acid Proliferation and Its Application

基于自催化酸解反应的酸增殖是新的提高成像灵敏度的方法。目前发现有实用价值的酸增殖剂绝大多数为磺酸酯类化合物。本文详细介绍了酸增殖机理和酸增殖剂的种类,比较了2-甲基-2-(对甲苯磺酰氧甲基)-3-酮-丁酸叔丁酯、环己二醇二甲苯磺酸酯、三聚羟基丙醛三对甲苯磺酸酯在化学增幅抗蚀剂体系中的应用性能,认为环己二醇二碳酸酯的灵敏度高,更具有实用价值。

Acid proliferation based on self-catalytic acid hydrolysis reaction is a kind of new method to improve imaging sensitivity. At present, most practical developed acid proliferation agents are almost sulfonates compounds. This paper detailed the mechanism of acid proliferation and its classes. A comparison of properties between 2-methyl-2-( p-tolylsulfo-nyl-oxo-methyl)-3-one-t-butyl butyrate, cyclohexadiolyl dimethylbenzene sulfonate and trilactic aldehyde tritosylate applied in chemically amplified photo resist system are made, and it is found out that the cyclohexadiolyl disulfamate has higher sensitivity, so it has great value.