化学沉积法制备CdS薄膜及性质研究

CdS THIN FILMS FABRICATED BY CHEMICAL BATH DEPOSITION

利用化学沉积 (CBD)的方法制备立方相的CdS薄膜。实验表明 ,在无搅拌、柠檬酸纳作为络合剂的条件下 ,在溶液的配方为 0 .0 2mol/L的CdCl2 、0 .0 2mol/L的柠檬酸钠、0 .0 5mol/L的CS(NH2 ) 2 的体系中 ,当 pH值为 11.5 ,溶液温度为 80℃时 ,在ITO玻璃上沉积得到CdS薄膜的前驱体 ,再把所得的前驱体在 35 0℃ ,N2 保护下热处理两个小时经X射线衍射 (XRD)和扫描电镜分析 ,表面薄膜是结晶良好、立方相、表面均匀光滑的CdS薄膜。随着热处理温度的提高 ,CdS薄膜的晶化程度有很大的提高 ,晶粒有明显的长大 ,其光学性能也有很大的改善。

Cubic phase CdS thin films have been prepared by chemical bath deposition (CBD). The CdS film precursors were deposited on ITO glass without stirring and sodium citrate using as the complexing agent by the solution consisting of 0.02 mol/L CdCl2, 0.02 mol/L sodium citrate and 0.05 mol/L CS(NH2)2 with pH 11.5 and temperature of 80°C. And the thin films were then annealed at 350°C for 2 h in N2 gas. X-ray diffraction (XRD) patterns and Scanning electron microscopy (SEM) images indicate that the deposited materials were well-crystallized, uniform, smooth and cubic CdS thin films. Furthermore, the grain sizes obviously increased and the optical property was greatly improved with increasing the annealing temperature.