四探针电动测试仪设计原理及维修

Design principles and maintenance of four-pin-probe electrodynamic instrument for semiconductor wafer evaluation

结合硅圆片电阻率测量和分档的实际需要,研制出电动型四探针测试仪.该测试仪具有恒流源电流可 调,数据读出迅速、稳定,四探针探头上升和下降电动化的特点.同时阐述该测试仪的维修要点.

An electrodynamic four-pin-probe instrument is developed and made for the need of measuring the resistivity of, and classifying the silicon wafers. This instrument is characteristic of possessing an adjustable constant-current source, fast and steady data readout, and motor-driven up and down motion of the probe. The main points of maintenance for the instrument are described as well.