离子复合对准分子ArF、Ar_2F形成过程的影响

Influence of Ion Recombination in the Formation Processes of ArF And Ar_2F Excimers

讨论了快放电激励下离子复合过程对ArF、Ar_2F形成过程的影响,得出离子复合过程对ArF、Ar_2F的贡献是一个长时间的慢变过程,其对ArF、Ar_2F的影响很小。

The influence of ion recombination reaction on ArF* and Ar_2F* excimers formationprocesses in He/Ar/F_2 mixtures under fast discharge was discussed.The conclusion wasmade that tke ion recombinatioti processes were of longtime apd s1owlywaried processes,tnd; their influenoe was very small in the ArF* and Ar_2F* formation processes.