摘要
微操作器是微操作机器人的核心部件,本文介绍了作者研制的压电陶瓷管驱动三自由度集成式微操作器,在此基础上,研制了微位移控制系统,包括双极性压电陶瓷驱动电流、微位移检测系统和微位移控制器,采用仿人智能PI控制方法,对微操作器进行了动静态测试,得到微操作器的性能指标。通过高精度位置闭环控制,补偿了压电陶瓷本身所具有的迟滞、蠕变、非线性等不足,提高了控制精度,达到了较好的控制效果。实验表明,该控制系统能够保证微操作器实现纳米级微动定位,满足微操作的要求。
Micromanipulator is the key component in a micromanipulating robot. A three degree-of-freedom integrated micromanipulator driven piezoelectric tubes was introduced. Based on that, the micropositioning control system was developed, including the bipolar piezoelectric driver and micropositioning measuring system and micropositioning controller. A biotic PI control method is proposed. The static and the dynamic tests were finished. As a result, some performances of micromanipulator are given. Thanks to high precision micropositioning closed-loop control, piezoelectric element's basic characteristicses such as hysteresis, creep and non-linearity were compensated successfully. The accuracy of micropositioning system was improved. So the control method was effective. Some experiments show that the micromanipulator can realize nanometer scale micropositioning by the micropositioning control system. Therefore, it is fit to be applied in micromanipulation.
出处
《电气自动化》
北大核心
2003年第2期13-16,共4页
Electrical Automation
基金
哈尔滨工业大学科研基金(HIT.2001.09)
